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发明名称
SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号
JPH09181285(A)
申请公布日期
1997.07.11
申请号
JP19950337443
申请日期
1995.12.25
申请人
NEC CORP
发明人
HAMASHIMA TOMOHIRO
分类号
H01L21/768;H01L21/02;H01L27/12;(IPC1-7):H01L27/12
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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