ANGULAR VELOCITY SENSOR.

摘要

The sensitivity of the sensor is improved by reducing the viscous resistance force of a gas exerted on a vibratory element, and reducing noises. The sensor comprises a first vibratory element (14) which is supported by a first supporting beam (15) vibratably in the direction (X-X) parallel to an upper base (12) and orthogonal to the supporting axis (O-O), and a second vibratory element (16) supported on the supporting axis (O-O) in the first vibratory element (14) by a second supporting beam (17), vibratingly in the direction (X-X) and in the direction (Z-Z) perpendicular to the upper supporting base (12). The vibratory elements (14 and 16) are vibratable in the direction (X-X) by the vibration generating parts (18). In this way, when a force (T) causing the second vibratory element (16) to rotate around the supporting axis (O-O), the second vibratory element (16) is displaced in the vertical direction (Z-Z) by the Corioli's force. The magnitude of this displacement is measured by the displacement detecting part (19) as a signal for measuring the angular velocity. <IMAGE>