| 摘要 |
PURPOSE:To prevent generation of debris by exciting a reactive gas through a plasma discharge and, while actuating it on a work, irradiating it with an excimer laser beam. CONSTITUTION:A working stage 3 containing a sample moving device 5 is provided inside a vacuum chamber 2. A quartz tube 7 is arranged through a part of the vacuum chamber 2, and a high-frequency coil 8 is coiled around the quartz tube 7. From the external end part of the quartz tube 7, a reactive gas which is an oxidizing gas or a reducing gas is supplied for a prescribed flow rate. While the inside of the vacuum chamber 2 is evacuated to a prescribed degree of vacuum by a vacuum pump 6, a high-frequency power is supplied to the high-frequency coil 8. Plasma is generated in the quartz tube 7 and reaches the surface of the work 4. When the work 4 is irradiated with the laser beam 9 through the quartz window 1, ablation is generated on the surface of the work 4. The scattered substance generated at this time is compounded with the excited gas molecule into a gaseous matter, and therefore no debris is produced. |
