| 摘要 |
<p>PURPOSE:To provide a transfer device for use in a clean room, which can hold plate-shaped electronic parts such as glass substrates one by one and position and place them on each stage such as processing devices with efficiency and accuracy. CONSTITUTION:A transfer device for use in a clean room includes a positioning device 1 having a lifting positioning mechanism provided on an elevating mechanism and using the lifting positioning mechanism to lift and position plate-shaped electronic parts conveyed in by means of a truck 8 and each held in a horizontal position, and a handling device 3 having a horizontal moving mechanism 32 provided on another elevating mechanism 31 and having a hand plate 34 on a moving body 33 traveling on the horizontal moving mechanism 32, for the plate-shaped electronic parts positioned by the positioning device 1 to be held on the hand plate 34 and moved.</p> |
