METHOD FOR DRYING RESIST FILM FORMED BY ELECTRODEPOSITION.
摘要
<p>A method of forming a photosensitive resist film for the manufacture of finely-machined precision parts, by which dehydration and baking of a resist film can be done by a short-time heating, the resist film formed is of a resolution much higher than conventional, and thin-film drying can be performed. After the electrodeposition coating, the resist film (2) is rolled by pressure rollers (4) while being heated. <IMAGE></p>
