| 摘要 |
<p>The hard disk read/write unit (30) is formed in a monolithic body (31) of semiconductor material, including a suspension structure (44), a coupling (36) integral with the suspension structure, and a microactuator (37), integral with the coupling. The monolithic body (31) has a first portion (31a) accommodating integrated electronic components (33), and a second portion (31b), accommodating the coupling (36) and the microactuator (37). The coupling (36) is formed from a central region (40), accommodating the microactuator (37); an annular region (41), separated from the central region (40) by a first trench (45), and from the suspension (44) by a second trench (46); a first pair of suspension arms (42), extending between the central region (40) and the annular region (41), along a first axis; and a second pair of suspension arms (43), extending between the annular region (41) and the suspension (44), along a second axis perpendicular to the first axis. The first and second pair of arms (42, 43), with a reduced thickness, impart to the coupling (36) yielding for rotations around the first and second axes of the central region. <IMAGE> <IMAGE></p> |
