发明名称 DETERMINATION OF OFFSET BETWEEN IC IMAGES
摘要 PURPOSE: To provide method and device for determining offset between two images which have reliability and are hardly affected by noises. CONSTITUTION: At a general-purpose digital serial processor, the offset between a pair of images is determined by using parallel processing technique. A patch composed of plural picture elements is selected, and convolution is performed by a Laplacian kernel. Concerning the result, convolution is performed in respective (x) and (y) directions by a Gaussian kernel, and registration images are formed. These registration images are binarized, bit packing is performed, and the respective plural relative offsets of these images are mutually correlated by executing EXOR processing at respective picture element positions. The results of this EXOR processing are added and image correlation values are generated for respective relative offsets. The image correlation expressing the highest correlation determines the relative offset of these images.
申请公布号 JPH076230(A) 申请公布日期 1995.01.10
申请号 JP19940044303 申请日期 1994.03.15
申请人 SHIYURUNBERUJIE TECHNOL INC 发明人 RICHIYAADO DEI BAANAADO
分类号 H01L21/66;G01R31/307;G06T1/00;G06T5/20;G06T7/00 主分类号 H01L21/66
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