SEMICONDUCTOR ACCELERATION SENSOR AND FABRICATION THEREOF

摘要

PURPOSE:To provide a highly accurate semiconductor acceleration sensor, and fabrication method thereof, in which the detection sensitivity is enhanced while reducing the size and the self-diagnostic function of sensitivity is also enhanced through the use of micromachining technology of semiconductor. CONSTITUTION:A silicon substrate is subjected to anisotropic etching to produce an gradually broadening extension weight part 14c which is bonded to the free end face of at the weight part 3 of a conventional semiconductor acceleration sensor in order to increase the mass at the weight part 3 thus enhancing the sensitivity in the detection of acceleration. The self-diagnostic function of detection sensitivity is also enhanced by increasing the area of free end face at the weight part 3 thereby increasing the electrostatic force functioning on a fixed electrode upon application of a voltage.