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发明名称
MIKROMECHANISCHES BAUELEMENT MIT SCHWINGKÖRPER
摘要
申请公布号
AT221212(T)
申请公布日期
2002.08.15
申请号
AT19980965838T
申请日期
1998.12.15
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
SCHENK, HARALD;DUERR, PETER;KUECK, HEINZ
分类号
G02B26/08;(IPC1-7):G02B26/08
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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