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发明名称
Verfahren zur Veränderung der Eigenschften von Halbleitern.
摘要
申请公布号
DE3750076(T2)
申请公布日期
1995.01.05
申请号
DE19873750076T
申请日期
1987.11.18
申请人
XEROX CORP., ROCHESTER, N.Y., US
发明人
EPLER, JOHN E., SUNNYVALE CALIFORNIA 94087, US;BURNHAM, ROBERT D., WHEATON ILLINOIS 60187, US
分类号
H01S5/00;H01L21/18;H01L21/20;H01L21/24;H01L21/263;H01L21/268;H01S5/20;H01S5/34;H01S5/40;(IPC1-7):H01L21/268;H01S3/19
主分类号
H01S5/00
代理机构
代理人
主权项
地址
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