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发明名称
Method for fabricating semiconductor diaphragms.
摘要
申请公布号
EP0389071(B1)
申请公布日期
1995.01.04
申请号
EP19900250023
申请日期
1990.01.30
申请人
DRESSER INDUSTRIES INC.
发明人
ZIAS, ARTHUR R.;BLOCK, BARRY;MAPES, KENNETH W.;NYSTROM, NORMAN L.;CADWELL, ROBERT M.;MAUGER, PHILIP E.
分类号
G01L9/04;B81B3/00;B81C1/00;G01L9/00;H01L29/84;(IPC1-7):G01L9/12;G01D5/02
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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