| 摘要 |
A method of inspecting a curved surface of a workpiece by a surface inspecting apparatus provided with a projecting device for illuminating the workpiece surface to be inspected with detection light, a detecting device for receiving and detecting the light reflected from the workpiece surface, and a condensing optical system for causing the reflected light to converge on a light-receiving surface of the detecting device. According to the method, the surface inspecting apparatus is successively displaced along the workpiece surface and the reflected light is detected by the detecting device. Further, image data obtained from the detecting device is held and binary digitized. It is determined whether or not the workpiece surface to be inspected is planar. If it is not planar, then the digitized image data is processed for dilation and erosion. Thus, when the workpiece surface is curved, faulty or defective spots can be reliably detected. If the workpiece surface is planar, the time required to process an image can be shortened.
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