STRUCTURE OF FORMER OF IMAGE SIGNALS ON CHARGE-COUPLED DEVICE AND PROCESS OF MANUFACTURE OF FORMER OF IMAGE SIGNALS

摘要

A CCD image sensor includes an n-type photo diode (15,18) and an n-type BCCD (16) supported by a p-type epitaxial layer (14) on an n-type substrate (11). An n-type region (12) for controlling an OFD voltage is disposed between the n-type substrate and the p-type epitaxial layer beneath the n-type photo diode. A p<+>-type region (13) for reducing the smear phenomenon is disposed between the n-type substrate and the p-type epitaxial layer beneath the n-type BCCD. These regions are spaced apart horizontally to provide a path for smear charge to the n-type substrate.