Method and apparatus for measuring the parallelism of two surfaces.

摘要

The parallelism of two nominally parallel surfaces is determined by placing a planar reflector (50) on one surface and a cube beam splitter (52) on the other surface. The reflector is placed to reflect light in a direction normal to the plane of the reflector. The cube beam splitter is placed to reflect part of the light striking a first face (54) back in the opposite direction. The cube beam splitter also reflects part of the incident light towards the reflector so that the reflector reflects the light back to the cube beam splitter, causing the light to exit the first cube beam splitter face. An autocollimator (10) is provided to direct a beam of light (24) into the first face (54) of the cube beam splitter (52) and to display the divergence between the first and second reflected beam portions, the divergence corresponding to the degree of non-parallelism between the two surfaces. <IMAGE>