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发明名称
TEMPERATURE CONTROL DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号
KR940011708(B1)
申请公布日期
1994.12.23
申请号
KR19910005462
申请日期
1991.04.04
申请人
NICHIDEN ANERUBA K. K.
发明人
TAKAHASHI, NOBUYUKI;AKIMOTO, TAKASHI;NAKAGAWA, TOSHIYUKI
分类号
H01L21/00;H01L21/683;(IPC1-7):C23C14/54
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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