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发明名称
Magnetische Objektivlinse für Elektronenstrahl-Belichtungsgerät.
摘要
申请公布号
DE68917749(T2)
申请公布日期
1994.12.22
申请号
DE19896017749T
申请日期
1989.02.15
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
YASUDA, HIROSHI C/O FUJITSU LIMITED, KAWASAKI-SHI KANAGAWA 211, JP;SUZUKI, MASAHIKO, DECEASED, JP
分类号
H01J37/141;H01J37/317;(IPC1-7):H01J37/141;H01J37/30
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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