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发明名称
WIRING FORMATION
摘要
申请公布号
JPH06349823(A)
申请公布日期
1994.12.22
申请号
JP19930136344
申请日期
1993.06.08
申请人
NEC CORP
发明人
SEKI YUKO;NAKANO KAICHIRO
分类号
H01L21/3205;H01L21/31;H01L21/768;H01L23/52;(IPC1-7):H01L21/320;H01L21/90
主分类号
H01L21/3205
代理机构
代理人
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