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发明名称
HEAT TREATING DEVICE
摘要
申请公布号
EP1376667(B1)
申请公布日期
2007.05.02
申请号
EP20020705408
申请日期
2002.03.20
申请人
TOKYO ELECTRON LIMITED
发明人
MAKIYA, TOSHIYUKI;SAITO, TAKANORI;EICKMANN, KARUKI;KAUSHAL, SANJEEV;DIP, ANTHONY;O'MEARA, DAVID L
分类号
G01K7/02;H01L21/31;C23C16/46;G01K1/20;G01K7/04;H01L21/22
主分类号
G01K7/02
代理机构
代理人
主权项
地址
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