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发明名称	FORMATION OF DIFFRACTION GRATING
摘要
申请公布号	JPH06347628(A)	申请公布日期	1994.12.22
申请号	JP19930140681	申请日期	1993.06.11
申请人	CANON INC	发明人	OGURI NOBUAKI
分类号	G02B5/18;(IPC1-7):G02B5/18	主分类号	G02B5/18
代理机构		代理人
主权项
地址

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