| 摘要 |
Three first patterned lines (1, 1, 1) made of aluminum extend in one direction on an insulation layer and are arranged at minimum intervals lambda 1 according to the design rules. End portions of the first patterned lines (1, 1, 1) are connected to those of three second patterned lines (2, 2, 2) made of aluminum extending along a line perpendicular to the first patterned lines (1, 1, 1). The second patterned lines (2, 2, 2) are arranged at intervals lambda 2, which are wider than the minimum interval lambda 1. All of the lines (1, 1, 1 and 2, 2, 2) have the minimum width according to the design rules. <IMAGE> |
