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发明名称
APPARATUS AND METHOD FOR MEASURING SURFACE SHAPE
摘要
申请公布号
JPH06347228(A)
申请公布日期
1994.12.20
申请号
JP19930139717
申请日期
1993.06.11
申请人
TOSHIBA CORP
发明人
SAMEDA YOSHITOMI
分类号
G01B11/24;(IPC1-7):G01B11/24
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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