PRODUCTION OF ZINC OXIDE-BASED THIN FILM

摘要

PURPOSE:To provide a transparent ZnO thin film which has been controlled in resistance to a desired level. CONSTITUTION:A zinc oxide thin film 3 is deposited on a substrate 1 followed by depositing a thin film 2 of a group III element thereon to incorporate said element into the zinc oxide thin film. Alternatively, a thin film of a group III element is deposited on a substrate followed by depositing a zinc oxide thin film and then carrying out a heat treatment to incorporate said element into the zinc oxide thin film.