发明名称 Method of manufacturing optical semiconductor element
摘要 In a method of manufacturing an optical semiconductor element including at least the steps of forming a mask having a stripe-like gap or interval on a semiconductor substrate, epitaxially growing a semiconductor ridge including an active layer on only an exposed gap portion of the semiconductor substrate, and epitaxially growing a semiconductor cladding layer to cover the ridge, the thickness of the active layer is substantially the same as the width of the active layer.
申请公布号 US5374587(A) 申请公布日期 1994.12.20
申请号 US19920920880 申请日期 1992.07.28
申请人 NEC CORPORATION 发明人 KITAMURA, SHOTARO
分类号 H01L21/20;H01L27/15;H01S5/00;H01S5/227;H01S5/50;(IPC1-7):H01L21/20 主分类号 H01L21/20
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