MAGNETIC FIELD DEFLECTION TYPE ELECTRON BEAM VAPOR-DEPOSITION DEVICE,申请号JP19930166369-传众专利搜索

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发明名称	MAGNETIC FIELD DEFLECTION TYPE ELECTRON BEAM VAPOR-DEPOSITION DEVICE
摘要
申请公布号	JPH06346231(A)	申请公布日期	1994.12.20
申请号	JP19930166369	申请日期	1993.06.10
申请人	YASKAWA ELECTRIC CORP	发明人	FUJII ETSUJI
分类号	C23C14/30;(IPC1-7):C23C14/30	主分类号	C23C14/30
代理机构		代理人
主权项
地址

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