发明名称 Position measuring device
摘要 A position measuring device for obtaining positional information by processing first and second sinusoidal signals having a phase difference of 90 DEG which are obtained by a detection device in accordance with a change in position comprises: adding and subtracting devices for generating a third sinusoidal signal by subtracting the second sinusoidal signal from the first sinusoidal signal, and for generating a fourth sinusoidal signal by adding the first and second sinusoidal signals; maximum and minimum measuring devices for measuring the respective maximum and minimum values of the first to fourth sinusoidal signals; and processing devices for calculating the amplitudes and axial segments of the respective first and second sinusoidal signals on the basis of the maximum and minimum values of the first and second sinusoidal signals which are measured by the maximum and minimum measuring devices in order to obtain fifth and sixth sinusoidal signals by standardising the first and second sinusoidal signals on the basis of the obtained amplitudes and axial segments, in order to form a seventh sinusoidal signal by subtracting the sixth sinusoidal signal from the fifth sinusoidal signal, and in order to generate an eighth sinusoidal signal by adding the fifth and sixth sinusoidal signals in order to correct the ratio of the seventh sinusoidal signal to the eighth sinusoidal signal ... Original abstract incomplete.
申请公布号 DE4419050(A1) 申请公布日期 1994.12.08
申请号 DE19944419050 申请日期 1994.05.31
申请人 NIKON CORP., TOKIO/TOKYO, JP 发明人 MORISHITA, AKIHIKO, KAWASAKI, KANAGAWA, JP;EDA, OSAMI, KAMAKURA, KANAGAWA, JP
分类号 G01D5/245;G01C1/02;G01D5/244;G01D5/347;H03M1/30;(IPC1-7):G01B21/00;G01B11/00;G01C1/00;G01D5/249;G01D5/36;H03M1/22 主分类号 G01D5/245
代理机构 代理人
主权项
地址