Process for purifying SF6

摘要

A process is described for purififying SF6, where the SF6 containing impurities of the type SFx (x < 6), SOxFy, WOxFy and WF6 is passed over a bed of an inert inorganic support coated with an alkali metal and located in a colume. The working temperature is here in the range up to 200 DEG C, preferably from 20 to 50 DEG C. The amount of alkali metal, preferably sodium, is calculated in such a way that the halides or oxyhalides present as impurities are completely bound.