PROCESS FOR PRODUCING INTEGRATED ACTIVE-MATRIX LIQUID CRYSTAL DISPLAYS

摘要

The invention pertains to a process for producing integrated active-matrix liquid crystal displays with a chequered silicon dice subdivided into picture elements. Each picture element consists of a light-controlling element and an integrated, driving electronic switching element (20) which drives the translucent electrode (16) of the picture element. The array of picture elements is covered with glass layers (6, 12) with polarising and analysing layers on their outer faces. The invention is characterised in that the switching elements are integrated into a transparent silicon layer in which optic windows for the light-controlling elements may are integrated. This is done by etching out a cavity in the silicon dice in the region of the liquid crystal display, leaving a thin layer of silicon or no silicon at all in the region of the optic window. On the thicker frame (10) of the silicon dice there is a drive circuit.