| 摘要 |
PURPOSE:To prevent the fatigue deterioration of a dielectric thin film by the repetition of the polarization inversion by providing a laminated structure, wherein a ferroelectric thin film is held with paraelectric thin films. CONSTITUTION:A paraelectric layer as the first layer, a PLZT layer as the second layer and a paraelectric layer as the third layer are constituted on a substrate 1. As the substrate 1, a material, which has epitaxial relationship with a dielectric thin film of magnesium oxide, is used. On the substrate 1, an SrTiO3 thin film 2 among perovskite-type paraelectrics is formed as the first layer. A PLZT thin film 3 of a perovskite-type ferroelectric is formed on the SrTiO3 thin film as the second layer. An SrTiO3 thin film 3 of a perovskite paraelectric thin film is formed on the PLZT thin film 3 as the third layer. The PLZT thin film 3 is not direct contact with an electrode or the substrate 1. The decrease in electric characteristics caused by the repetition of the electric field of the ferroelectric thin film is suppressed. |
