| 摘要 |
<p>PURPOSE:To suppress crack generation in a control electrode (upper side Cr layer) during heating treatment of an insulating base. CONSTITUTION:In an electron emitting element consisting of an insulating base plate 1, a base electrode 3 formed on the insulating base plate 1, a cathode layer 4 formed on the base electrode 3 to emit electrons from an edge part 4a, an insulating layer 6 formed on the outside of the cathode layer 4 while being apart from the layer 4 by a prescribed distance, and a control electrode 5 for taking out electrons formed on the insulating layer, the insulating layer 6 is made to be a compounded layer consisting of a SiO2 layer 6a and an upper Al2O3 layer 6b. Crack generation on the control electrode 5 (upper part Cr layer) can be suppressed during heating by making the uppermost layer of the insulating layer 6 to be an Al2O3 layer.</p> |
