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发明名称
CHARGED PARTICLE BEAM IRRADIATION DEVICE
摘要
申请公布号
JPH06333525(A)
申请公布日期
1994.12.02
申请号
JP19930156020
申请日期
1993.05.21
申请人
BEAM TEC:KK
发明人
SUGANUMA TADAO
分类号
H01J37/04;H01J37/06;H01J37/09;H01J37/141;(IPC1-7):H01J37/141
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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