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发明名称
System zum Zusammenfügen von Mustern und Elektronenstrahl-Abrasterungsverfahren.
摘要
申请公布号
DE3889695(T2)
申请公布日期
1994.12.01
申请号
DE19883889695T
申请日期
1988.06.10
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
RUDERT, JOHN RICHARD, JR., FISHKILL, N.Y. 12524, US
分类号
G03F7/20;H01J37/302;H01L21/027;H01L21/30;(IPC1-7):H01J37/317
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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