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经营范围
发明名称
Process for producing self-aligned tungsten silicide.
摘要
申请公布号
EP0362081(B1)
申请公布日期
1994.11.30
申请号
EP19890420326
申请日期
1989.09.06
申请人
FRANCE TELECOM
发明人
TORRES, JOAQUIM;PALLEAU, JEAN;BOURHILA, NOUREDDINE
分类号
H01L21/28;H01L21/285;(IPC1-7):H01L21/60;H01L21/90;H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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