摘要 |
PURPOSE:To provide an ultrasonic motor which has a wide movable range for a drive frequency and operates stably. CONSTITUTION:A linear motor 1 consists of a basic elastic body 3, two lamination-type piezoelectric elements 4 fixed at the basic elastic body 3 and a cross roller guide 30 pressed against the basic elastic body 3 and generates a longitudinal vibration and a flex vibration at the elastic body 3 by applying AC voltage to two lamination-type piezoelectric elements 4, thus driving a cross roller guide 30. Then, by adjusting the vertical dimension of the basic elastic body 3 properly, the resonance frequency of flex vibration is reduced, for example approximately by 3%, thus making nearly symmetrical the speed characteristic at both sides of a frequency where the maximum speed can be obtained. |