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发明名称
Messverfahren für die Gleichstrom/Gleichspannungs-Charakteristik von Halbleiterbauteilen.
摘要
申请公布号
DE69013459(D1)
申请公布日期
1994.11.24
申请号
DE19906013459
申请日期
1990.10.19
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP;TOSHIBA MICRO-ELECTRONICS CORP., KAWASAKI, JP
发明人
NAKAMURA, OSAMU, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP
分类号
H01L21/66;G01R31/26;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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