Device for cooling a film-forming gas

摘要

A device for cooling a film-forming gas, consisting of a vertical container (1) through which gas (G) flows, at least two heating surface units (3, 9; 9, 13) which are arranged in the container, assembled from at least one heating surface constructed with a closed geometry, and through which cooling medium flows, and a plurality of rappers (7; 11, 14), assigned to the individual heating surfaces, for the mechanical cleaning of the heating surface. In order to simplify the way the heating surface units are supported while guaranteeing cleaning, it is provided in the device that the upper (3; 9) of the heating surface units (3, 9; 9, 13) is supported (2) on the container (1), and the lower heating surface (9; 13) is connected via connecting pipes (8; 12), through which the cooling medium flows, to the upper heating surface unit (3; 9) in such a way that the cooling medium flows sequentially through the heating surface units (6; 10; 13'), and the connecting pipes (8; 12) between the heating surfaces form an open geometry which does not impede the rapping effect (7; 11; 14) at the individual heating surface units. <IMAGE>