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发明名称
摘要
申请公布号
JPH0693481(B2)
申请公布日期
1994.11.16
申请号
JP19890193849
申请日期
1989.07.28
申请人
发明人
分类号
H01L23/10;H01L27/14;(IPC1-7):H01L23/10
主分类号
H01L23/10
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代理人
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