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发明名称
DRY ETCHING
摘要
申请公布号
JPH06318576(A)
申请公布日期
1994.11.15
申请号
JP19930128309
申请日期
1993.04.30
申请人
OKI ELECTRIC IND CO LTD
发明人
MIHASHI TOSHIRO
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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