发明名称 SUPPORT FOR DISK-LIKE OBJECT
摘要 <p>In a holder (100) for a disc-like article, there is provided in the surface (9, 10) facing the disc-like article a nozzle (8), from which gas emerges and holds the disc-like article, by means of the low pressure arising as a result of the Bernoulli principle, against a circular annular projection (108) provided in the surface (10) facing the article. The projection (108) is elastically flexible in the direction of the axis (14) of the holder (100), i.e. perpendicularly to the surface (10) of the holder (100) facing the article, so that the article is held securely on the holder (100) against displacement in a direction parallel to the surface (10) without it being necessary to provide lateral supports such as cams or the like. Since lateral supports can be forgone, these do not also hinder the flowing off of treatment liquid from the edge of the article which is secured on the holder (100). <IMAGE></p>
申请公布号 JPH06316777(A) 申请公布日期 1994.11.15
申请号 JP19940007281 申请日期 1994.01.26
申请人 S II Z SEMICONDUCTOR EQUIP TSUBEHEEA FUR JI HARUBURAITAAFUERUTEIGUNGU GMBH 发明人 FURANTSU SUMUNICHIE
分类号 C23F1/08;H01L21/00;H01L21/306;H01L21/683;(IPC1-7):C23F1/08 主分类号 C23F1/08
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