Method and device for producing semiconductor layers

摘要

In order to improve a method for producing semiconductor layers, in which the semiconductor layer is ablated from a target using a pulsed laser beam and deposited as a layer on a substrate, such that the best possible layers can be obtained using this method, it is proposed to produce the target as a particle composite of particles of the semiconductor material and for the particles to be selected with a particle size such that essentially per laser pulse at least a considerable portion of a particle is evaporated or ablated.