| 摘要 |
PCT No. PCT/SU91/00088 Sec. 371 Date Mar. 2, 1993 Sec. 102(e) Date Mar. 2, 1993 PCT Filed May 8, 1991 PCT Pub. No. WO92/19925 PCT Pub. Date Nov. 12, 1992.The method and apparatus operate to complete the following stages. At the first stage the coating is held at room temperature in the time interval from 20 s to 1 hour, depending on the type of polymer coating. At the second stage the coating is held at an elevated temperature under excessive pressure, sufficient for suppressing propagation of microcracks in such time interval so that at reaching the predetermined protective properties the thermodestruction of the polymer coating does not occur. At the third stage performed is the cooling of the coating to room temperature. According to the invention, the excessive pressure is built up at the first stage and maintained at the cooling stage. The invention may find application in manufacture of integrated circuits, as well as for the formation of thin polymer insulation coatings.
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