发明名称 GAS SUPPLY NOZZLE OF RADICAL REACTION TYPE PRECISION MACHINING DEVICE
摘要 <p>PURPOSE:To properly and efficiently supply a reaction gas to the machining, part of a thin work to be machined. CONSTITUTION:A through hole 1a is formed at a nozzle body 1 while it communicates with a circulation hole 1b of a reaction gas. A wire electrode W is passed through the through hole 1a and is moved in a longitudinal direction and the reaction gas is discharged toward a work M to be machined from a gas discharge port 1c. The reaction gas flows coaxially with the wire electrode W and the flow cannot be prevented by the wire electrode W.</p>
申请公布号 JPH06310475(A) 申请公布日期 1994.11.04
申请号 JP19930098170 申请日期 1993.04.23
申请人 NIIGATA ENG CO LTD 发明人 FURUYAMA MICHIO;YOSHIDA TAKESHI;KINO YOSHIMI
分类号 B23H7/36;B23P15/16;B28D5/04;H01L21/301;H01L21/304;H01L21/78;(IPC1-7):H01L21/304 主分类号 B23H7/36
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