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发明名称
PLASMA PROCESSING SYSTEM
摘要
申请公布号
JPH06310435(A)
申请公布日期
1994.11.04
申请号
JP19930091745
申请日期
1993.04.20
申请人
SONY CORP
发明人
OTA KATSUHIKO;YAMAGUCHI TERUO
分类号
H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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