| 摘要 |
<p>PURPOSE:To provide an aligner enhanced in throughput by a method wherein a reticle provided to the aligner is efficiently replaced. CONSTITUTION:A storage 8 wherein reticles are temporarily kept is provided on a transfer route which starts from a reticle library 1 wherein reticles are kept and terminates at a reticle stage 5 via a pre-alignment mechanism 3 which roughly positions a reticle. A reticle changer 6 which holds reticles and delivers a reticle to the reticle stage 5 moving to a light exposure position is provided adjacent to the reticle stage 5. While an exposure process is performed by the use of reticles R1 to R3 on the reticler changer 6, reticles R4 to R6 used in a following exposure process are taken out of the reticle library 1, roughly positioned by the pre-alignment mechanism 3, and housed in the storage 8, After a light exposure process carried out with reticles R1 to R3 is finished, the reticles R1 to R3 are replaced with the reticles R4 to R6 kept in the storage 8.</p> |
