| 摘要 |
PURPOSE:To provide an acceleration sensor that detects acceleration in multiple directions and has high detection sensitivity. CONSTITUTION:Two vibrators 12 and 14 of rectangular-plate-shape are placed on one central axis, and they are connected together so that their main surfaces cross each other. A piezoelectric element 16a, etc., are farmed on both main surfaces of the vibrator 12, and a piezoelectric element 24b, etc., on both main surfaces of the vibrator 14. The vibrators 12 and 14 are supported by frames 32 and 38, for weights 36 and 42 to be formed at their ends. By applying the piezoelectric elements 16a and 24b, etc., with drive signal, lengthwise vibration is allowed to take place so that expansion and contraction of respective vibrators 12 and 14 occur alternately. By measuring difference in output voltage at piezoelectric elements 16a, etc., the acceleration component orthogonal to the main surface of the vibrator 12 is detected. Further, by measuring difference in output voltage at piezoelectric elements 24b, etc., the acceleration component orthogonal to the main surface of the vibrator 14 is detected. |
