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发明名称
BEAM ORBIT RESTORING METHOD IN ION IMPLANTING DEVICE
摘要
申请公布号
JPH06310082(A)
申请公布日期
1994.11.04
申请号
JP19930123369
申请日期
1993.04.26
申请人
NISSIN ELECTRIC CO LTD
发明人
KUMAZAKI HIRONORI
分类号
C23C14/48;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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