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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06310578(A)
申请公布日期
1994.11.04
申请号
JP19930121989
申请日期
1993.04.26
申请人
NEC CORP
发明人
SAITO TADASHI;SUZUKI SEIICHI
分类号
H01L21/60;H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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