METHOD FOR EVALUATING ETCHING REACTION SPEED

摘要

PURPOSE:To perform measurement in real time by fitting an electrode cell consisting of a ring-shaped operation electrode and a disk-shaped counter electrode into the chamber of an etching device and then spraying an etching liquid and then measuring cathode limit diffusion current. CONSTITUTION:An electrode cell 20 constituted of two electrodes of platinum- platinum consists of a ring-shaped operation electrode and a disk-shaped counter electrode. The electrode cell 20 is set to an etching device 40 and cathode limit diffusion current is measured. For example. ferric chloride liquid solution is used as the etching liquid. Cathode polarization is performed using a potentiostat and the liquid solution resistance obtained by measuring impedance is canceled by feedback compensation.