发明名称 Magnetfeldabschirmung mit einem supraleitenden Film
摘要 A magnetic field shield including a superconductive film characterized in that the magnetic field shield comprises a superconductive film layer constituted primarily of a mixed crystalline body of niobium nitride and titanium nitride laminated on a metal substrate, that the magnetic field further comprises a nobium-titanium alloy layer or a metal film layer in the above lamination, that the magnetic field comprises a plurality of the above-mentioned layers, and that the magnetic field has a plurality of small holes passing through the layers in the direction of the thickness. The magnetic field shield of the present invention produces an excellent magnetic field shielding effect due to a superconductive characteristic peculiar to the superconductive film layer constituted primarily by a mixed crystalline body of niobium nitride and titanium nitride. The cooling effect of the metal substrate maintains the magnetic field shielding effect at a high level. In addition, due to the use of the niobium-titanium alloy layer, the magnetic field shield has high resistance against peeling, greatly increasing the practical usefulness of the magnetic field shield. In the case of the magnetic field shield with a plurality of the laminated layers, the cooling effect of the metal film layers included in the multiple layers stably maintains the magnetic field shielding effect of the superconductive film layers. In the case of the magnetic field shield with small holes, the electromagnetic shielding and cooling effects of the holes are added to further strengthen the magnetic field shielding effect.
申请公布号 DE3833886(C2) 申请公布日期 1994.11.03
申请号 DE19883833886 申请日期 1988.10.05
申请人 OSAKA PREFECTURE, OSAKA, JP;KOATSU GAS KOGYO CO., LTD., OSAKA, JP 发明人 OGAWA, SOUICHI, KOBE, HYOGO, JP;SUGIOKA, TAKAO, OSAKA, JP;INOUE, MASARU, OSAKA, JP
分类号 H01L39/00;H01L39/24;H05K9/00 主分类号 H01L39/00
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