发明名称 |
High purity bulk chemical delivery system |
摘要 |
An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainment of particulates, while still reducing moisture contents below 100 parts per billion and achieving appropriate pressure drops without two phase flow.
|
申请公布号 |
US5359787(A) |
申请公布日期 |
1994.11.01 |
申请号 |
US19930049042 |
申请日期 |
1993.04.16 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
MOSTOWY, JR., LEWIS J.;CHOWDHURY, NASER M. |
分类号 |
C23C16/44;(IPC1-7):F26B3/00 |
主分类号 |
C23C16/44 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|