| 摘要 |
<p>PURPOSE:To prevent a device from being complicated when a plurality of bar codes are provided in a reticle. CONSTITUTION:A reticle 1, supplied to an exposure device, has a reticle pattern 1a in the most part of a surface of the reticle, and in blank parts 1b, 1c in right/left sides of the reticle pattern 1a, respective alignment marks 2, 3 are provided. In the right side blank part 1b, a pair of bar codes 4, 5 are provided by interposing the alignment mark 2, and both the bar codes are arranged in series in a direction as shown by a line A-A. When each bar code 4, 5 is read by a bar code reader, not shown in the drawing, the bar code reader may be only required to be moved linearly in a direction shown by the line A-A, with no necessity for changing a moving direction of the bar code reader and using a plurality of the bar code readers.</p> |
